International Standard
ISO 13083:2015
Surface chemical analysis — Scanning probe microscopy — Standards on the definition and calibration of spatial resolution of electrical scanning probe microscopes (ESPMs) such as SSRM and SCM for 2D-dopant imaging and other purposes
Reference number
ISO 13083:2015
Edición 1
2015-08
International Standard
Vista previa
ISO 13083:2015
52691
No disponible en español
Publicado (Edición 1, 2015)
Esta norma se revisó y confirmó por última vez en 2022. Por lo tanto, esta versión es la actual.

ISO 13083:2015

ISO 13083:2015
52691
Idioma
Formato
CHF 96
Convertir Franco suizo (CHF) a tu moneda

Resumen

ISO 13083:2015 describes a method for measuring the spatial (lateral) resolution of scanning capacitance microscopes (SCMs) or scanning spreading resistance microscopes (SSRMs), which are widely used in imaging the distribution of carriers and other electrical properties in semiconductor devices. The method involves the use of a sharp-edged artefact.

Informaciones generales

  •  : Publicado
     : 2015-08
    : Norma Internacional confirmada [90.93]
  •  : 1
     : 14
  • ISO/TC 201/SC 9
    71.040.40 
  • RSS actualizaciones

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