Resumen
This document specifies spectroscopic ellipsometry for the determination of optical properties (refractive index n and extinction coefficient k) and the optical classification of different types of amorphous carbon films within the n-k plane.
It is applicable to amorphous carbon films deposited by ionized evaporation, sputtering, arc deposition, plasma-assisted chemical vapour deposition, hot filament techniques and others.
It does not apply to carbon films modified with metals or silicon, amorphous carbon films that have a gradient of composition/property in the thickness, paints and varnishes.
Informaciones generales
-
Estado: PublicadoFecha de publicación: 2021-05Etapa: Norma Internacional publicada [60.60]
-
Edición: 1Número de páginas: 7
-
Comité Técnico :ISO/TC 107ICS :25.220.99
- RSS actualizaciones
Ciclo de vida
¿Tiene alguna duda?
Consulte nuestras Ayuda y asistencia
Atención al cliente
+41 22 749 08 88
Horario de asistencia:
De lunes a viernes - 09:00-12:00, 14:00-17:00 (UTC+1)