Reference number
ISO 15632:2021
© ISO 2024
International Standard
ISO 15632:2021
Microbeam analysis — Selected instrumental performance parameters for the specification and checking of energy-dispersive X-ray spectrometers (EDS) for use with a scanning electron microscope (SEM) or an electron probe microanalyser (EPMA)
Edition 3
2021-02
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Publiée (Edition 3, 2021)

ISO 15632:2021

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CHF 96
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Résumé

This document defines the most important quantities that characterize an energy-dispersive X‑ray spectrometer consisting of a semiconductor detector, a pre-amplifier and a signal-processing unit as the essential parts. This document is only applicable to spectrometers with semiconductor detectors operating on the principle of solid-state ionization. This document specifies minimum requirements and how relevant instrumental performance parameters are to be checked for such spectrometers attached to a scanning electron microscope (SEM) or an electron probe microanalyser (EPMA). The procedure used for the actual analysis is outlined in ISO 22309[2] and ASTM E1508[3] and is outside the scope of this document.

Informations générales

  • État actuel
     : Publiée
    Date de publication
     : 2021-02
    Stade
    : Norme internationale publiée [60.60]
  • Edition
     : 3
  • Comité technique :
    ISO/TC 202
    ICS :
    71.040.99 
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