Résumé
PrévisualiserThis document specifies the substrate conditions and testing of the modulation period (including the principles for low-angle X-ray methods, the requirements of the coatings, the requirements for X-ray measuring apparatus, the calibration of apparatus and samples, and the testing conditions and calculation process) of nano-multilayer coatings by low-angle X-ray methods including X-ray reflectivity (XRR) and glancing incident X-ray diffraction (GIXRD).
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État actuel: PubliéeDate de publication: 2022-07
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Edition: 1
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- ICS :
- 25.220.01 Traitement et revêtement de surface en général
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fr
Format | Langue | |
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std 1 61 | PDF + ePub | |
std 2 61 | Papier |
- CHF61
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