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Standard and/or project under the direct responsibility of ISO/TC 201/SC 6 Secretariat | Stage | ICS |
---|---|---|
Diagnostic method whether a binary organic mixture can be quantitated by the relative sensitivity factor methods for SIMS
|
20.00 |
|
Surface chemical analysis — Secondary-ion mass spectrometry — Method for depth profiling of arsenic in silicon
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90.93 | |
Surface chemical analysis — Secondary-ion mass spectrometry — Calibration of the mass scale for a time-of-flight secondary-ion mass spectrometer
|
95.99 | |
Surface chemical analysis — Secondary ion mass spectrometry — Calibration of the mass scale for a time-of-flight secondary ion mass spectrometer
|
90.92 | |
Surface chemical analysis — Secondary ion mass spectrometry — Calibration of the mass scale for a time-of-flight secondary ion mass spectrometer
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30.99 |
|
Surface chemical analysis — Secondary-ion mass spectrometry — Determination of boron atomic concentration in silicon using uniformly doped materials
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95.99 | |
Surface chemical analysis — Secondary-ion mass spectrometry — Determination of boron atomic concentration in silicon using uniformly doped materials
|
90.93 | |
Surface chemical analysis — Secondary-ion mass spectrometry — Method for depth profiling of boron in silicon
|
95.99 | |
Surface chemical analysis — Secondary-ion mass spectrometry — Method for depth profiling of boron in silicon
|
90.93 | |
Surface chemical analysis — Secondary ion mass spectrometry — Linearity of intensity scale in single ion counting time-of-flight mass analysers
|
95.99 | |
Surface chemical analysis — Secondary ion mass spectrometry — Linearity of intensity scale in single ion counting time-of-flight mass analysers
|
60.60 | |
Surface chemical analysis — Secondary-ion mass spectrometry — Determination of relative sensitivity factors from ion-implanted reference materials
|
95.99 | |
Surface chemical analysis — Secondary-ion mass spectrometry — Determination of relative sensitivity factors from ion-implanted reference materials
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60.60 | |
Surface chemical analysis — Secondary-ion mass spectrometry — Method for estimating depth resolution parameters with multiple delta-layer reference materials
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90.93 | |
Surface chemical analysis — Secondary ion mass spectrometry — Correction method for saturated intensity in single ion counting dynamic secondary ion mass spectrometry
|
90.92 | |
Surface chemical analysis — Secondary ion mass spectrometry — Correction method for saturated intensity in single ion counting dynamic secondary ion mass spectrometry
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20.00 |
|
Surface chemical analysis — Secondary ion mass spectrometry — Method for determining yield volume in argon cluster sputter depth profiling of organic materials
|
90.60 | |
Surface chemical analysis — Secondary ion mass spectrometry — Method for the measurement of mass resolution in SIMS
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60.60 | |
Surface chemical analysis — Secondary-ion mass spectrometry — Method for depth calibration for silicon using multiple delta-layer reference materials
|
90.93 | |
Surface chemical analysis — Secondary-ion mass spectrometry — Repeatability and constancy of the relative-intensity scale in static secondary-ion mass spectrometry
|
90.93 |
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