Reference number
ISO/TS 25138:2019
Technical Specification
ISO/TS 25138:2019
Surface chemical analysis — Analysis of metal oxide films by glow-discharge optical-emission spectrometry
Edition 2
2019-08
Technical Specification
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ISO/TS 25138:2019
74823
Published (Edition 2, 2019)

ISO/TS 25138:2019

ISO/TS 25138:2019
74823
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CHF 173
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Abstract

This document describes a glow-discharge optical-emission spectrometric method for the determination of the thickness, mass per unit area and chemical composition of metal oxide films.

This method is applicable to oxide films 1 nm to 10 000 nm thick on metals. The metallic elements of the oxide can include one or more from Fe, Cr, Ni, Cu, Ti, Si, Mo, Zn, Mg, Mn, Zr and Al. Other elements that can be determined by the method are O, C, N, H, P and S.

General information

  •  : Published
     : 2019-08
    : International Standard to be revised [90.92]
  •  : 2
     : 40
  • ISO/TC 201/SC 8
    71.040.40 
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