Reference number
ISO/TR 15969:2021
Technical Report
ISO/TR 15969:2021
Surface chemical analysis — Depth profiling — Measurement of sputtered depth
Edition 2
2021-03
Technical Report
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ISO/TR 15969:2021
80118
Published (Edition 2, 2021)

ISO/TR 15969:2021

ISO/TR 15969:2021
80118
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Format
CHF 96
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Abstract

This document provides guidelines for measuring the sputtered depth in sputtered depth profiling. 

The methods of sputtered depth measurement described in this document are applicable to techniques of surface chemical analysis when used in combination with ion bombardment for the removal of a part of a solid sample to a typical sputtered depth of up to several micrometres. The depth typically determined by this approach is between 1 nm to 500 µm.

General information

  •  : Published
     : 2021-03
    : International Standard published [60.60]
  •  : 2
     : 13
  • ISO/TC 201/SC 4
    71.040.40 
  • RSS updates

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