This standard was last reviewed and confirmed in 2019.
Therefore this version remains current.
Abstract
PreviewISO 20341:2003 specifies procedures for estimating three depth resolution parameters, viz the leading-edge decay length, the trailing-edge decay length and the Gaussian broadening, in SIMS depth profiling using multiple delta-layer reference materials.
It is not applicable to delta-layers where the chemical and physical state of the near-surface region, modified by the incident primary ions, is not in the steady state.
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Status: PublishedPublication date: 2003-07
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Edition: 1Number of pages: 5
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- ICS :
- 71.040.40 Chemical analysis
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| Format | Language | |
|---|---|---|
| std 1 40 | ||
| std 2 40 | Paper |
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