ISO 20341:2003 specifies procedures for estimating three depth resolution parameters, viz the leading-edge decay length, the trailing-edge decay length and the Gaussian broadening, in SIMS depth profiling using multiple delta-layer reference materials.
It is not applicable to delta-layers where the chemical and physical state of the near-surface region, modified by the incident primary ions, is not in the steady state.
Status: PublishedPublication date: 2003-07
Edition: 1Number of pages: 5
Technical Committee: ISO/TC 201/SC 6 Secondary ion mass spectrometry
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