ISO 27911:2011 describes a method for determining the spatial (lateral) resolution of an apertured near-field scanning optical microscope (NSOM) by imaging an object with a size much smaller than the expected resolution. It is applicable to aperture-type NSOMs operated in the transmission, reflection, collection or illumination/collection mode.
Status: PublishedPublication date: 2011-08
Edition: 1Number of pages: 18
Technical Committee: ISO/TC 201/SC 9 Scanning probe microscopy
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