ISO 11505:2013 describes a glow discharge optical emission spectrometric (GD-OES) method for the determination of the thickness, mass per unit area and chemical composition of surface layer films.
It is limited to a description of general procedures of quantification of GD-OES and is not applicable directly for the quantification of individual materials having various thicknesses and elements to be determined.
Status: PublishedPublication date: 2012-12
Edition: 1Number of pages: 33
Technical Committee: ISO/TC 201/SC 8 Glow discharge spectroscopy
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