ISO 11938:2012 - Microbeam analysis — Electron probe microanalysis — Methods for elemental-mapping analysis using wavelength-dispersive spectroscopy

Published (Edition 1, 2012)

This publication was last reviewed and confirmed in 2022. Therefore this version remains current.

ISO 11938:2012

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Abstract

This International Standard provides procedures for electron microprobe elemental-mapping analysis using

wavelength-dispersive spectrometry. The choice between mapping with the electron beam moving digitally

across the specimen (electron beam mapping) and mapping with stage movement only (large-area mapping) is

assessed. It describes five types of data processing: the raw X‑ray intensity data method, the k‑value method,

the calibration method, the correlation method and the matrix correction method.

General information

Status
: Published

Publication date
: 2012-03

Stage
: International Standard confirmed [90.93]
Edition
: 1

Number of pages
: 10
Technical Committee :
ISO/TC 202/SC 2

ICS :
71.040.50
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Life cycle

Now

Published

ISO 11938:2012

A standard is reviewed every 5 years
Stage: 90.93 (Confirmed)

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