ISO 11952:2014 specifies methods for characterizing and calibrating the scan axes of scanning-probe microscopes for measuring geometric quantities at the highest level. It is applicable to those providing further calibrations and is not intended for general industry use, where a lower level of calibration might be required.
Status: WithdrawnPublication date: 2014-05
Edition: 1Number of pages: 58
Technical Committee: ISO/TC 201/SC 9 Scanning probe microscopy
- ICS :
- 71.040.40 Chemical analysis
ISO 11952:2014Stage: 95.99
Got a question?
Check out our FAQs
+41 22 749 08 88
Monday to Friday - 09:00-12:00, 14:00-17:00 (UTC+1)
Keep up to date with ISO
Sign up to our newsletter for the latest news, views and product information.