Reference number
ISO 17973:2016
ISO 17973:2016
Surface chemical analysis — Medium-resolution Auger electron spectrometers — Calibration of energy scales for elemental analysis
Edition 2
2016-09
Withdrawn
ISO 17973:2016
71084
Withdrawn (Edition 2, 2016)

Abstract

ISO 17973:2016 specifies a method for calibrating the kinetic energy scales of Auger electron spectrometers with an uncertainty of 3 eV, for general analytical use in identifying elements at surfaces. In addition, it specifies a method for establishing a calibration schedule. It is applicable to instruments used in either direct or differential mode, where the resolution is less than or equal to 0,5 % and the modulation amplitude for the differential mode, if used, is 2 eV peak-to-peak. It is applicable to those spectrometers equipped with an inert gas ion gun or other method for sample cleaning and with an electron gun capable of operating at 4 keV or higher beam energy.

General information

  •  : Withdrawn
     : 2016-09
    : Withdrawal of International Standard [95.99]
  •  : 2
     : 11
  • ISO/TC 201/SC 7
    71.040.40 
  • RSS updates

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