International Standard
ISO/TR 15969:2021
Surface chemical analysis — Depth profiling — Measurement of sputtered depth
Reference number
ISO/TR 15969:2021
Edición 2
2021-03
© ISO 2024
International Standard
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Publicado (Edición 2, 2021)

ISO/TR 15969:2021

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CHF 96
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Resumen

This document provides guidelines for measuring the sputtered depth in sputtered depth profiling. 

The methods of sputtered depth measurement described in this document are applicable to techniques of surface chemical analysis when used in combination with ion bombardment for the removal of a part of a solid sample to a typical sputtered depth of up to several micrometres. The depth typically determined by this approach is between 1 nm to 500 µm.

Informaciones generales

  • Estado
     : Publicado
    Fecha de publicación
     : 2021-03
    Etapa
    : Norma Internacional publicada [60.60]
  • Edición
     : 2
    Número de páginas
     : 13
  • Comité Técnico :
    ISO/TC 201/SC 4
    ICS :
    71.040.40 
  • RSS actualizaciones

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