Borrador del Comité
ISO/CD 23131-3
Ellipsometry — Part 3: Transparent single layer model
Reference number
ISO/CD 23131-3
ISO/CD 23131-3
Edition 1
© ISO 2024
Borrador del Comité
Resumen
This document uses ellipsometric measurements and their analysis to specify the method for the determination of the layer thickness d of a transparent layer and the optical (refractive index n) or dielectric (real part ε1) constants/functions based on the transparent single layer model within a spectral region, for which k = 0 applies.
Informaciones generales
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Estado: En desarrolloEtapa: Cierre del periodo de observaciones [30.60]
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Edición: 1
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Comité Técnico :ISO/TC 107
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