Committee Draft
ISO/CD 23131-3
Ellipsometry — Part 3: Transparent single layer model
Reference number
ISO/CD 23131-3
Edition 1
© ISO 2024
Committee Draft
Under development
A draft is being reviewed by the committee.

Abstract

This document uses ellipsometric measurements and their analysis to specify the method for the determination of the layer thickness d of a transparent layer and the optical (refractive index n) or dielectric (real part ε1) constants/functions based on the transparent single layer model within a spectral region, for which k = 0 applies.

General information

  • Status
     : Under development
    Stage
    : Close of comment period [30.60]
  • Edition
     : 1
  • Technical Committee :
    ISO/TC 107
  • RSS updates

Life cycle

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This standard contributes to the following Sustainable Development Goals

1
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3
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6
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7
Affordable and Clean Energy
8
Decent Work and Economic Growth
9
Industry, Innovation and Infrastructure
11
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12
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13
Climate Action

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