ISO/CD TS 25138
Surface chemical analysis — Analysis of metal oxide films by glow-discharge optical-emission spectrometry
Reference number
ISO/CD TS 25138
ISO/CD TS 25138
Edición 3
© ISO 2024
Committee Draft
u
ISO/CD TS 25138
87872
Resumen
This document describes a glow-discharge optical-emission spectrometric method for the determination of the thickness, mass per unit area and chemical composition of metal oxide films.
This method is applicable to oxide films 1 nm to 10 000 nm thick on metals. The metallic elements of the oxide can include one or more from Fe, Cr, Ni, Cu, Ti, Si, Mo, Zn, Mg, Mn, Zr and Al. Other elements that can be determined by the method are O, C, N, H, P and S.
Informaciones generales
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Estado: En desarrolloEtapa: Borrador de comité (CD) registrado [30.00]
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Edición: 3
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Comité Técnico :ISO/TC 201/SC 8
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Ciclo de vida
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Anteriormente
PublicadoISO/TS 25138:2019
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Ahora
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