Draft
Technical Specification
ISO/DTS 25138
Surface chemical analysis — Analysis of metal oxide films by glow discharge optical emission spectrometry
Reference number
ISO/DTS 25138
Edition 3
© ISO 2024
Draft Technical Specification
Under development
This draft is in the approval phase.
Will replace ISO/TS 25138:2019

Abstract

This document describes a glow-discharge optical-emission spectrometric method for the determination of the thickness, mass per unit area and chemical composition of metal oxide films.

This method is applicable to oxide films 1 nm to 10 000 nm thick on metals. The metallic elements of the oxide can include one or more from Fe, Cr, Ni, Cu, Ti, Si, Mo, Zn, Mg, Mn, Zr and Al. Other elements that can be determined by the method are O, C, N, H, P and S.

General information

  • Status
     : Under development
    Stage
    : Final text received or FDIS registered for formal approval [50.00]
  • Edition
     : 3
  • Technical Committee :
    ISO/TC 201/SC 8
    ICS :
    71.040.40 
  • RSS updates

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