Status : Published (Under review)

This standard was last reviewed and confirmed in 2021. Therefore this version remains current.
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Abstract

ISO 13424:2013 specifies the minimum amount of information required in reports of analyses of thin films on a substrate by XPS. These analyses involve measurement of the chemical composition and thickness of homogeneous thin films, and measurement of the chemical composition as a function of depth of inhomogeneous thin films by angle-resolved XPS, XPS sputter-depth profiling, peak-shape analysis, and variable photon energy XPS.

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General information

  • Status
     : Published
    Publication date
     : 2013-10
    Stage
    : International Standard confirmed [90.93]
  • Edition
     : 1
    Number of pages
     : 46
  • Technical Committee :
    ISO/TC 201/SC 7
    ICS :
    71.040.40 
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This standard contributes to the following Sustainable Development Goal

9
Industry, Innovation and Infrastructure

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